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The Applied Vantage is among the most versatile thermal processing platform in the marketplace, addressing all spike, soak, Call and silicide anneals, thermal nitridation, and equally dry and radical oxidation. Obtainable Together with the Applied RadiancePlus RTP or Applied RadOx RTP chambers, the procedure one-way links two procedure chambers to an Applied manufacturing facility interface and monitor robot To optimize productivity for every sq. foot.
The affect of temperature and roughness to the bottom emissivity of Si wafers was examined. In situ measurements were being performed in two industrial fast thermal processing devices. An experimental…
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Affect of temperature and backside roughness to the emissivity of Si wafers through rapid thermal processingapple4d login